Organic Vapor Phase Deposition

Highest productivity with low operating costs

APEVA offers a revolutionary deposition technology for the deposition of organic semiconductor materials for the production of organic light emitting diodes (OLED) and flexible electronics for use in flat screens and lighting as well as for other semiconductor applications. OVPD is an innovative technology for thin-film deposition of so-called organic "small molecules" based on the principle of gas phase transport.

In the process developed and patented by Professor Stephen R. Forrest (Princeton University, USA), the organic materials evaporate in a fine vacuum and transported to the substrate by means of an inert carrier gas, where they are deposited. Compared to conventional technologies (vacuum thermal evaporation - VTE), this technology has significant advantages in terms of process control, reproducibility and operating costs.

The American company Universal Display Corp. (UDC) owns the rights to use the OVPD patents and licensed these exclusively to AIXTRON in 1999 for the development, manufacture and sale of OVPD systems.

With the support of UDC, AIXTRON has developed OVPD production systems with a focus on the requirements for OLED technologies. For this purpose, AIXTRON has combined OVPD with the protected Close Coupled Showerhead (CCS) technology, which is already used successfully in other AIXTRON deposition systems (MOCVD) for the series production of semiconductor components.

Based on this know-how, APEVA is working on the continuous further development of the OVPD technology until it is ready for the market.

Key advantages of OVPD

  • Short Thermal Evaporation + Carrier Gas
  • High material utilization per design
  • Multi-layer deposition in one Chamber
  • High uptime (In-situ Refill)
  • Scalability