Rapid Hot Quartz Crystal Microbalance
Precise measurement of deposition rates is key to produce great OLED devices. For that purpose, APEVA has developed its proprietary Rapid Hot Quartz Crystal Microbalance (RHQCM). Besides providing exact monitoring capabilities during the deposition process, RHQCM also greatly reduces maintenance requirements.
Key advantages of RHQCM
- Long life rate measurement with RHQCM
- Long crystal life time due to fast in-situ bake-out possibility
- No system downtime during preventive maintenance (QCM hot swap, t < 30 min)
- Accurate vapor measurement < ± 0.4 µg/s
- Accurate real-time in-situ measurement & control of evaporation rate